Description
The AccuSizer Mini system is engineered using a modular design that allows us to match sensors and fluidics options to customer slurries and process equipment. Our systems generate the highest accuracy and resolution results quickly and at count rates higher than any other technology. This improves statistics to assure detection of large particle counts (LPC) that reduce yields.
- A variety of custom autodilution modules assure the perfect concentration is delivered to the sensor for measurement
- Using the single particle optical sizing (SPOS) technique, a range of sensors operating at focused size ranges and concentration limits provide the highest accuracy results
- Use this system to continuously monitor LPC in your CMP slurry delivery system and as a tool to optimize filtration and other process conditions
AccuSizer Mini LE System
- Range: 0.5 - 400 µm, up to 9,000 particles/mL
- Single or dual stage dilution fluidics
- Ideal for silica CMP slurries